Gas separators and gas purifiers
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Cryogenic air separators which generate high-purity nitrogen and oxygen by filling LN2 or LO2 as a cooling source instead of using an expansion turbine.
Single tower type oxygen gas generator utilizing a pressure vacuum swing adsorption (PVSA) technology with simple structure and high recovery ratio.
Energy-saving and small home medical oxygen concentrator with a pressure swing adsorption (PSA) technology.
Cryogenic technology
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Thermal insulation technology to store cryogenic substances (such as liquid nitrogen at -196ºC) maintaining heat invasion at in extremely low level.
Cryogenically cooling technology utilizing pulse tube refrigeration that achieves high efficiency and high output through an active buffer.
Surface treatment
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A compound metal surface treatment technology combined with the nitriding process, carbon solid-solution diffusion process, and chromium diffusion process.
Surface-modification technology generating glow discharge at atmospheric pressure.
This enables glass substrate cleaning, ashing, etching, and improvement in wettability and adhesion performance of plastic films.
Gas application technology
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a generator which creates a mixture of oxygen and hydrogen gas through the electrolysis of water for gas cutting.
This provides high cutting speed and smooth surface cut with low distortion.
Technology for effectively synthesizing hydrogen utilizing the natural gas and LPG as raw materials through a special catalyst.
Deposition technology
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This is an ultra-high vacuum CVD system which provides excellent characteristics in thin film growth including selective growth and a superlattice structure. This system features high performance in film thickness control as well as low contamination, large-area film uniformity, and maintenance-free construction.
